CMP, Generally known as thermal oxidation sprucing, makes use of MP along side chemical substances to enhance the MRR and enhance surface high-quality [twenty]. Figure two illustrates the schematic of a standard CMP process [21]. The SiC wafer, which happens to be preset to the provider, along with the polishing https://www.quora.com/profile/Trevor-Flatcher-2/Role-of-Silicon-Carbide-in-Fuel-Cells-Silicon-carbide-SiC-plays-a-crucial-role-in-advancing-fuel-cell-technology-off